.....        ...............         Semiconductor Equipment & Process Specialists

                             H O M EEQUIPMENTSPARE PARTSSERVICE                    e-mail

   РУСКИЙ                          COMPONENTS and ASSEMBLIES 

OEM                                     Description
Alcatel Alcatel 2033C
Alcatel Alcatel 2033CP
Alcatel Alcatel A100LI
Alcatel Alcatel ADP100PI   
Alcatel Alcatel ADP31M
Alcatel Alcatel portable air-cooled diffusion pump vacuum system
AMAT AMAT Centura, HART Chamber, Top Source Upgrade Kit
AMAT AMAT Centura-HART, Poly etch. Top Source Upgrade Kit.  
AMAT AMAT P5000 Mark-1. Si-Oxide-Resist chambers and peripherals 
AMAT Applied Materials:  ORBOT WF 736 - Bright Field Inspection Tool  (Vintage:  1999) (Crated)
AMAT ASP Chamber
AMAT Edwards Pump.
AMAT G10 - source head w/magnets
AMAT G12 - source head w/magnets
AMAT HTHU Heater (Pt#:  0010-75152)
AMAT MXP Chamber
AMAT MXP+ Chamber
AMAT Preclean Chamber (Model: Preclean)  8"
AMAT Preclean Chamber for Epi System  8"  
AMAT PVD Magnet (Pt#:  0010-01231)
AMAT PVD Magnet (Pt#:  0010-20221)
AMAT PVD Magnet (Pt#:  0010-20223)
AMAT PVD Magnet (Pt#:  0010-20768)
AMAT PVD Magnet (Pt#:  0010-21668)
AMAT PVD Magnet (Pt#:  0010-21844)  
AMAT PVD Magnet (Pt#:  0010-76693)  
AMAT PVD Magnet (Pt#:  0040-20201)
AMAT Water Cooled Chamber (Model: PVD)  8"  
AMAT Wide Body Chamber  (Model: PVD) 8"
Anelva Anelva LC-1015 Sputtering System for parts
ASM ASM PECVD, 4" susceptor, 37 inches long (Silicon Carbide)
Balzers Balzers BAF400 Freeze-etching system for TEM sample preparation
Balzers Balzers LLS-801 sputtering system for parts
Balzers Balzers Pump DIF040W KF40. 40 l/s
Balzers Balzers Pump DIF063 ISO63. 180 l/s
Balzers Balzers Pump DIF160 ISO160. 1,100 l/s
Balzers Balzers Pump DIF250 ISO250. 3,100 l/s
Balzers Balzers Pump DIF500A ISO500. 11,500 l/s
Balzers Balzers Right Angle Pumping Stack
Brooks Brooks APS-2XST.  Auto Wafer Sorter
Canon Canon SMIF Reticle Changer
Convac Convac CRM200 Lift Off System (Vintage:  1992)  
Crystar SiC Paddles, 89" long with split-load end
Crystar Silicon Carbide Paddles w/1inch square shank and 89 inches long
CTI CTI Cryo-Torr 10 (refurbished)
CTI CTI Cryo-Torr 8 (refurbished)
Custom Hi-temp, Vacuum Furnace.  2400C, 0.01Torr
CVC CVC PSE43 High Vacuum station
DNS DNS WS620C spin module.  Wafer size is 150mm. New.
EDAX EDAX EDX, System DX4 (for XL50)
EDAX EDAX System DX4 RTEM-SUTW
Edwards Edwards 100C Diffstak ISO100 -no valve. 300 l/s
Edwards Edwards 100P Diffstak ISO100 air-operated. 280 l/s
Edwards Edwards 160F Diffstak 8" od Conflat flange -no valve
Edwards Edwards 160M Diffstak ISO160 -manual. 700 l/s, 60# 110 volt heater
Edwards Edwards 63P Diffstak ISO 63  air operated. 135 l/s
Edwards Edwards CR100P Diffstak ISO100 cryocooled , air-operated
Edwards Edwards Cryo Cooled Diffstak 63 packaged pump system
Edwards Edwards Cryo-cooled Diffstak 63 packaged pumping system – air-operated
Edwards Edwards E2M12
Edwards Edwards E2M18
Edwards Edwards E2M28
Edwards Edwards E2M40
Edwards Edwards E2M80
Edwards Edwards EH1200
Edwards Edwards EH250
Edwards Edwards EH500A
Edwards Edwards EO4 ISO100-12 hole flange. 600 l/s
Edwards Edwards ESDP30A
Edwards Edwards IPX100A
Edwards Edwards QDP40
Edwards Edwards QDP80
Edwards Edwards QMB250
Edwards Edwards QMB500
FSM FSM 8800 - Stress (Vintage:  1989)
Hitachi Hitachi 4500 SEM
Hitachi Hitachi 8620 CD SEM  (Vintage:  1990)
Hitachi Hitachi 8820 CD SEM  
Hitachi Hitachi 911 Analyzer
Innotec Innotec S1000 high speed pump module
Keithly Keithly 350 parts tool.  Has power supply s/n 229240.
KHV Key High Vacuum Products Portable 3" air-cooled diffusion pump system
KLA 710-058894
KLA 710-060031
KLA 710-060515
KLA KLA Prometrix SM 300 - Thin Film (Vintage:  1992)  
KLA KLA TENCOR HRP100 - Contact Profiler (Vintage:  Aug, 2000)
KLA KLA TENCOR P11 - profiler (Working) (Vintage:  1996)
KLA KLA TENCOR P30 (Working w/o Main Computer and Some Parts)
KLA KLA TENCOR Prometrix RS 50 - Resistivity (Vintage:  1994)   
KLA KLA TENCOR TF2  -6" to 8"  (Crated) (Vintage:  1989)
LAM LAM Cap Lower Electrode, p/n 715-011985-106, with vent.
LAM LAM Cooling Ring Upper Electrode, p/n 715-011502-001.
LAM LAM Edge Sensor Assembly, p/n 853-012500-002.
LAM LAM Electrode Clamp Ring, p/n 716-028028-004.
Lam Lam Exelan PM Chamber, including Gas Box and Endpoint
LAM LAM Insulator Ring Lower Electrode, p/n 716-011624-001.
LAM LAM Insulator Ring Upper Electrode, p/n 716-011536-001.
LAM LAM Lower Edge Focus Ring, p/n 716-020904-016
LAM LAM Orifice Filler w/c, p/n 716-011570-001.
LAM LAM Plate w/Attachment, p/n 716-011923-001.
LAM LAM Ring Clamp Lower Electrode, p/n 716-011623-001.
LAM LAM Wafer Holder, p/n 715-021741-006.
Leybold Leybold D40BCS
Leybold Leybold Dryvac 50S 
Leybold Leybold Quadrex 200 RGA Mass Spectrometer
Leybold Leybold WAU251
Leybold Leybold WAU501
Leybold Leybold WS1001
Lindberg Lindberg L82418-21A oven, s/n 949323.
Microbar MicroBar Track Mate bulk chemical dispense.  Resist developer
Motion Automation Motion Automation wafer transfer, s/n 544.  Wafer size is 150mm.
Neslab Neslab NX-300 Air Cooled Chiller
Nippon Pillar Nippon Pillar Packing Company Bellows Pumps, model PE 20MA.  
Norcimbus Norcimbus Power Purge IV new automatic gas cabinet.  New
NRC NRC 33l7 High Vacuum Pumping System
OneAC OneAC CDR 36I power conditioner, s/n 9847-4903. 
PE Perkin Elmer Analyst 3030 AAS System
Plasmos Plasmos SD 4000 automated Ellipsometer thickness measurement system. 
QI Quartz baffles (end caps) 
QI Quartz boats
QI Quartz boats with end for 6 inch wafers
QI Quartz Drip trays for POCL
QI Quartz liner 195mm ID, 84inches long
QI Quartz liner 225mm ID, 235 OD and 84 inches long
QI Quartz liner 225mm ID, 235 OD and 92 inches long
QI Quartz tubes 195mm ID,  205OD and 92 inches long
QI Quartz Tubes for diffusion furnace, for 4" and 6" wafers 
SAES SAES CES-PS7-MG40, Hydrogen Gas Purification System  
Schumaker Schumacher Heated Vapor Flow Controller, VMDOT / VMDTEOS